| 摘要 |
PURPOSE:To enable displays of diffraction images to be also performed by detecting electron rays traveling in a specific direction after being transmitted by the sample, and display the detection output as an image synchronously with the slant rotation of electron rays becoming incident upon the sample. CONSTITUTION:Electron rays (EB) discharged from an electron gun 3 becomes incident upon a sample 5 through a focusing lens 4. An X and a Y deflection coil 10a and 10b are placed between the lens 4 and an objective 6. In the center of a fluorescent plate 11, a small fluorescent plate 11S is installed which is rotated along axis 12 so as to introduce electron rays traveling along optical axis (C) toward the downside of the fluorescent plate 11. Transmitted electron rays are detected by a transmitted electron detector 14 to produce a luminance signal which is then supplied to a CRT15. The coils 10a and 10b are controlled by a signal from a scanning rotation circuit 16 controlled by both an input circuit 21 and a control circuit 20 and a signal from an alignment-signal-producing circuit 19. The CRT15 is subjected to circular scanning synchronously with the slant rotation produced by the circuit 16, thereby enabling displays of diffraction images to be also performed.
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