| 摘要 |
PURPOSE:To obtain the titled aqueous solution useful as a developing liquid and ringing liquid in the manufacture of integrated circuits, by reacting a trialkylamine vapor with an alkylene oxide vapor in pure water in a non-oxidizing atmosphere. CONSTITUTION:The objective solution can be produced by reacting the vapor of trialkylamine of formula N(R)3 (R is 1-4C alkyl) with the vapor of alkylene oxide of formula (R' is H or 1-2C alkyl) in pure water having oxygen content of <=1ppm, in a non-oxidizing atmosphere. EFFECT:The color development of the solution during the long-term storage can be suppressed remarkably. The produced solution has high commercial value and high reliability and is free from the undesirable effect to the IC device.
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