| 摘要 |
PURPOSE:To measure a minute moving distance by irradiating in a dot shape or a slit shape an energy beam of a laser, etc. condensed along a lengthwise direction of a scale base or a circumferential direction of a disk. CONSTITUTION:A magnetic measuring instrument has a scale base 7 which is fixed to a base to be worked 6 and consists of a conductive alloy or a ferromagnetic material. In this state, by controlling a laser generator 1 by a controlling circuit, a laser light is changed as to its path by a reflecting mirror 4 and focused by a focusing lens 5, and by using a mask in accordance with necessity, it is irradiated as a pulse intermittence of the laser light to the scale base 7 by a spot of a prescribed minute shape or a desired shape and size of a short wire shape, etc. According to such a constitution, on the scale base, for instance, a hole whose hole diameter is 5mu can be worked at an interval of 5mu on a stainless steel thin film, and a minute moving distance can be measured.
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