| 摘要 |
PURPOSE:To prevent adhesion of impurities to a semiconductor wafer etc. before setting to a reaction tube by a method wherein a gas injection hole is provided to a portion where a boat of a fork is placed on. CONSTITUTION:When a portion 29, where a boat 28 of a fork 23 is placed on, positions outside a reaction tube 21, gas is supplied from a fork main body 24 side to a gas injection tube 25 and the gas is blown against a tip section of the main body 24, the boat 28 and a semiconductor wafer 27 from the injection hole 26 of the injection tube 25. Thereby, adhesion of impurities can be prevented. When a mounting section 29 is entered wholly to the reaction tube 21, gas injection is stopped. |
