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发明名称
ELECTRON BEAM EXPOSURE SYSTEM
摘要
申请公布号
EP0066882(A3)
申请公布日期
1985.06.05
申请号
EP19820105022
申请日期
1982.06.08
申请人
HITACHI, LTD.;NIPPON TELEGRAPH AND TELEPHONE PUBLIC CORPORATION
发明人
SHIBAYAMA, AKINORI;FUJINAMI, MINPEI;YODA, HARUO
分类号
H01L21/027;H01J37/302;H01L21/30;(IPC1-7):H01J37/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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