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经营范围
发明名称
Optical metrology
摘要
申请公布号
GB2149098(A)
申请公布日期
1985.06.05
申请号
GB19840024997
申请日期
1984.10.03
申请人
* VICKERS PLC
发明人
DEREK STANLEY * MOORE;CHRISTOPHER PAUL * KIRK
分类号
G01B11/02;(IPC1-7):G01B9/04
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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