| 摘要 |
PURPOSE:To obtain a photomagnetic recording medium which has superior reproduction characteristics while increasing the angle of Kerr rotation and improving the S/N ratio by forming a thin film of Tb-Sm-Fe-Co quadri-amorphous alloy having an easy magnetization axis perpendicular to the film surface on a base. CONSTITUTION:A magnetron sputtering device is used to sputter the 1st target 2 of, for example, Tb, Fe, and co and the 2nd target 3 of Sm over the surface of the substrate 4 arranged over a shield plate 5 through circular through holes 6 and 6 formed in the shield plate 6 having the through-holes right above the targets respectively, thereby obtaining the magnetic recording medium which has the easy magnetization axis perpendicular to the surface of the substrate 4 made of the thin film of Tb-Sm-Fe-Co quadri-amorphous alloy. The composition of the respective components is as shown by a formula (where x, y, and z are atom%; 0<x<=65, 0<y<100, and 10<=z<=30). Thus, the superior reproduction characteristics are obtained. |
