TESTING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PURPOSE:To facilitate probing into an integrated circuit by means of an electron beam by a method wherein an opening is provided in a passivation film covering a conductive path for the exposure of the conductive path. CONSTITUTION:An opening 2 is provided in a passivation film 3 covering a conductive path 1 for exposure of the conductive path 1 to a testing electron beam. The opening 2 needs not be larger than required for the detection of secondary electrons or others emitted by the conductive path 1 under an electron beam. Such steps are taken as connecting a second conductive path 4 to be probed to the conductive path 1 and positioning Vss or Vcc to surround the conductive path 1 to isolate the conductive path 1 against adversary influence expected to be exerted by a signal path 11.