摘要 |
PURPOSE:To couple adjacent elements in series at the side end without shortcircuiting by forming the first conductive film on the overall surface on a substrate, and then forming the second conductive film above the fourth opened groove formed by a laser light therein from the end of the substrate by utilizing the frame of the second conductive film. CONSTITUTION:A light transmission conductive film 5 is formed on a glass plate 1, scribing line opened grooves 13, 13' are formed by scanning a laser, the first electrodes 37, 39 are formed, and thereby forming the first and second element regions 31 and 11. The second groove 18 is formed at the left side of the first groove 13 to expose the sides 8, 9 of the first electrode. The second conductive film 4 of the back surface is formed, cutting and separating third groove 20 is further formed, a plurality of elements 31, 11 are connected in series by a coupler 12, and a silicon nitride film 21 is further formed, thereby preventing the leakage current between the elements from generating. Further, external leading terminal 23 is provided at the periphery 5. |