| 摘要 |
Apparatus (10) for deposition of fluid and gaseous media on substrates (18), comprising a cabin (32), in which series of segments (34, 36, 38 . . . 68) are located aside a central passage (80, 96). Media, flowing through apertures between these segments towards and along substrates, passing through the passage, create micro-sized cushions (20, 22) aside such substrates for floating, transport and processing thereof.
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