| 摘要 |
PURPOSE:To enable to automatically cancel an error due to the displacement of the position of eight piezoelectric resistance elements by a pressure sensor itself without almost loss of its sensitivity even if the displacement occurs by arranging the elements on a square-shaped circular diaphragm formed on a semiconductor substrate by a specific method to form a bridge circuit. CONSTITUTION:A diaphragm 2 is formed circularly in a square shape by a square-shaped circular groove 1a on a semiconductor substrate 1, and the first resistance element group 3 which includes four resistance elements 31, 32, 33, 34 of the same resistance value interposed at both sides of the inner wall of the central groove 1a and hence a hill, and the second resistance element group 3' which includes four resistance elements 3'1, 3'2, 3'3, 3'4 equivalent to the elements 31, 32, 33, 34 are arranged as shown. The elements 31 and 34, 32 and 33, 3'1 and 3'4, 3'2 and 3'3 are respectively connected in series, and a bridge circuit 4 is formed so that the sides of the first series circuit 31, 34 belonging to the element groups and the sides of the circuit 3'1, 34 form an opposed pair and the sizes of the second series circuit 32, 33 and the sides of 3'2, 3'3 form an opposed pair.
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