| 摘要 |
PURPOSE:To eliminate a ventilation of air between a chemical fluid tank side and a driving part side and to eliminate contamination of articles and chemical fluid tanks by a method wherein an exhaust vent combined with a partition is formed between the chemical fluid tank side and the driving part side. CONSTITUTION:Plural pieces of chemical fluid tanks 23, plural pieces of part it ions 31 and 32, which are located between an article transferring unit and the driving parts 40-59 of the article transferring unit and have beeen provided a partial aperture thereon respectively, isolation walls 37 and 38 provided between the abovementioned partitions 31 and 32, a drain pan 39 for liquid recovery, and a suction unit 60, which sucks from between the partitions 31 and 32 are provided. Steam, which generates from the chemical liquid tank 23, pass through the apertures 33 and 34 of the partition 31 and is exhausted from an exhaust vent 26 to the outside, while dusts, oil mists, etc., which generate from the driving parts 40-59, pass through the apertures 35 and 36 of the partition 32 and are exhausted from the exhaust vent 26 to the outside. The exhaust unit 60 has been provided at the tip of the exhaust vent 26 and the unit 60 performs a forced exhaustion. Chemical fluid, etc., liquified between the partitions 31 and 32 are recovered in the drain pan 39 having been provided on the lower sides of the partitions 31 and 32. Moreover, chemical fluid are partitioned by the isolation walls 37 and 38 and an evacuation of steam, which generates from the chemical fluid tanks, is contrived in such a way as to be able to perform in every description of chemical fluid.
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