| 摘要 |
PURPOSE:To prevent ink-mark operation at an unnecessary position by processing the moving-pattern information of a table, the coordinate-pattern information of a chip and a defective information signal from a wafer tester and ink-mark operating an ink marking mechanism. CONSTITUTION:In a wafer probe control section 40, coordinates are computed by a microprocessor section, and the coordinate informations are transmitted over a chip coordinate-pattern memory processing section 43 through a signal line 42 from an XYZ moving-coordinate generating section 38. Timing signals, etc. are transmitted over the chip coordinate-pattern processing section 43 through a signal line 41 from the microprocessor section. The result obtained by processing these informations and chip coordinate-pattern informations memorized to a chip coordinate information memory section 45 is transmitted over a signal line 44. An ink mark operation section 30 processes the informations transmitted over the signal line 44 by an AND operation section 31 together with acceptable or defective signal informations transmitted from a wafer tester 7, and generates the operation signals of an ink marking mechanism. |
