PROJECTION TYPE EXOSING DEVICE

摘要

PURPOSE:To prevent generation of a magnification error and trapezoidal error and to form a prescribed pattern with high shape accuracy by attaching a piezoelectric body to the recticule support part of a reticle stage and maintaining the reticle level at all times. CONSTITUTION:A condenser lens 14 is installed via a reticule stage 13 above a projecting lens 12 on a moving base 10 on which a semiconductor 11 is installed. When electricity is conducted to a piezoelectric body 17 attached to a reticle support part 16, a reticle can be maintained at the prescribed level by the expansion and contraction of said body. The generation of a magnification error and trapezoidal error is thus prevented and the prescribed pattern is easily formed with high shape accuracy on the semiconductor substrate 11.