| 摘要 |
PURPOSE:To enable a given assembly accuracy to be achieved by fixing wire- like electrodes and fixing frames together by sintering after placing a control frame made of a material having a smaller thermal expansion coefficient than the fixing frames adjacent to the fixing frames. CONSTITUTION:A control frame 8 made of a material having a thermal expansion coefficient smaller than that of fixing frames 5 is placed adjacent to the fixing frames 5. After that, heating is performed in a sintering furnace. The expansion of wire-like electrodes 3 caused by the heating is absorbed by springs 2. The fixing frames 5 also expand during the heating. The expansion of the fixing frames 5 is restricted by the control frame 8 having a smaller thermal expansion coefficient than the fixing frames 5 in such a manner as to concentrate the load of the expansion in the centers of the Y-direction spans of the fixing frames 5 so as to fix the fixing frames 5 and the wire-like electrodes 3 together by means of frit glass 4 during the sintering. As a result, during cooling, the wire-like electrodes 3 are fixed to and stretched across the fixing frames 5 without being warped in Z direction. |
