| 摘要 |
PURPOSE:To prevent the damage of a lens or a specimen by detecting the contact of the specimen with the lens surface, by interposing a pressure sensor between the lens and a lens holder. CONSTITUTION:A pressure sensor 14 comprising conductive rubber or a piezoelectric element is interposed between an ultrasonic condensing lens 11 and a lens holder 12. When a specimen holder stand 5 is moved to a Z-direction and a specimen 7 is contacted with a lens 11, pressure is added to the sensor 14 and the resistance value thereof is reduced while an electric signal is detected by a detector circuit. If an alarm or an alarm apparatus is operated or the movement of the specimen holding stand 5 is stopped by using this detection signal, the damage of the lens 11 and the specimen 7 can be prevented. |
