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发明名称
HOCHGESCHWINDIGKEITS-KATHODEN-ZERSTAEUBUNGSVORRICHTUNG.
摘要
申请公布号
CH649578(A5)
申请公布日期
1985.05.31
申请号
CH19820001682
申请日期
1982.03.18
申请人
NIHON SHINKU GIJUTSU KABUSHIKI KAISHA
发明人
NAKAMURA, KYUZO;OHTA, YOSHIFUMI;YAMADA, TAIKI
分类号
C23C14/34;H01J37/34;(IPC1-7):C23C14/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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