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经营范围
发明名称
Capacitive mask aligner
摘要
申请公布号
GB2148515(A)
申请公布日期
1985.05.30
申请号
GB19840025831
申请日期
1984.10.12
申请人
* VARIAN ASSOCIATES INC
发明人
ARMAND P * NEUKERMANS;JAMES H * BOYDEN;GARRETT A * GARRETTSON;STEVEN G * EATON
分类号
G01B7/31;G01D5/241;G03F9/00;(IPC1-7):G01B7/02
主分类号
G01B7/31
代理机构
代理人
主权项
地址
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