| 摘要 |
PURPOSE:To eliminate internal reflection in an acoustic lens and to obtain an ultrasonic transducer which can irradiate the ultrasonic wave of a superhigh frequency band by adhering an ultrasonic vibrator and an electrode on the surface of a damping member made of a formed body. CONSTITUTION:A forming mold 11 whose bottom face 11a is a nonspherical face is prepared, and for example, a damping material such as an epoxy resin to which metal powder is added is injected from a nozzle 12 to the inside of the forming mold 11 for molding. Next, a molded damping member 13 is taken out from the forming mold 11, and a SiO2 film 14 adheres on the surface which is molded on the nonspherical face in correspondence to the bottom face 11a by spattering. In addition, a lower-part electrode 15 which is made of Ni-Cr and Au is deposited on the film 14. Next, an ultrasonic vibrator 16 made of ZnO is spattered, and in addition, an upperpart electrode 17 made of Ni-Cr and Au is deposited. Finally, a SiO2 film 18 is spattered and an ultrasonic transducer is obtained. In this way, the internal reflection is eliminated and in addition, the ultrasonic wave of the superhigh frequency band can be irradiated. |
