发明名称 |
VARIABLE CAPACITANCE PRESSURE TRANSDUCER ASSEMBLY |
摘要 |
A capacitive pressure transducer assembly having a semiconductor transducer device, a substrate, and a cover for use in conducting a fluid pressure to be sensed to the exterior surfaces of the transducer device. The transducer device may have a glass, silicon or other nonconductive material as a base on which a metal capacitor plate is formed. The other capacitor plate may be formed of doped silicon or other semiconductor material. Also, the substrate on which the transducer device is mounted may have additional and related circuitry implemented in thick film technology (ceramic substrate) or integrated circuit technology (semiconductor substrate). |
申请公布号 |
DE3070552(D1) |
申请公布日期 |
1985.05.30 |
申请号 |
DE19803070552 |
申请日期 |
1980.09.03 |
申请人 |
FORD MOTOR COMPANY LIMITED;FORD-WERKE AKTIENGESELLSCHAFT;FORD FRANCE SOCIETE ANONYME;FORD MOTOR COMPANY |
发明人 |
GIACHINO, JOSEPH MARIO;HAEBERLE, RUSSELL JAMES;CROW, JOSEPH WILLIAM |
分类号 |
G01L9/12;G01L9/00;(IPC1-7):G01L9/12 |
主分类号 |
G01L9/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|