| 摘要 |
PURPOSE:To stably lead out secondary ions even when a sample is tilted by comprising a mesh electrode so as to always maintain the state of covering a sample holder by the arbitrary revolution of the sample holder. CONSTITUTION:A mesh electrode 5 that covers a sample holder 6 has the semispherical entire shape and consists of separate first and second mesh electrodes 5' and 7. The first mesh electrode 5' is fixed to a lead-out electrode 4. In addition, suppose that the sample holder 6 can be rotated for the maximum angle theta clockwise, the first mesh electrode 5' has a notched shape for the maximum angle theta of the left end side. On the other hand, the second mesh 7 is fixed to the sample holder. Furthermore, when the sample holder 6 is positioned horizontally, it is formed so as to cover the opening secion of the partly notched mesh electrode 5' and the sample holder 6 is formed so as to cover the opening section formed at the right when the holder 6 is rotated to the theta angle. |
