发明名称 |
ARTICLE HANDLING DEVICE AND METHOD |
摘要 |
An article handling device which is particularly well suited for loading articles into a reactor furnace for processing and subsequently unloading the processed articles. The article handling device is supported and vertically movable into alignment with the reactor furnace and includes an article moving device which is reciprocally vertically elevatable and reciprocally horizontally extensible for loading the articles into the reactor furnace and subsequent unloading thereof with minimal disturbing of the reactor process residue which is inherently deposited in the interior of the reactor furnace. |
申请公布号 |
JPS6095920(A) |
申请公布日期 |
1985.05.29 |
申请号 |
JP19840209021 |
申请日期 |
1984.10.04 |
申请人 |
ADOBANSUTO SEMIKONDAKUTAA MATEIRIARUZU AMERIKA INC |
发明人 |
DONARUDO MONROO OORUSON;NOOMAN REONAADO JIYAKUSON;JIERII AANESUTO TON |
分类号 |
B25J9/00;B25J17/02;B65G47/90;H01L21/22;H01L21/31;H01L21/67;H01L21/677 |
主分类号 |
B25J9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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