发明名称 ARTICLE HANDLING DEVICE AND METHOD
摘要 An article handling device which is particularly well suited for loading articles into a reactor furnace for processing and subsequently unloading the processed articles. The article handling device is supported and vertically movable into alignment with the reactor furnace and includes an article moving device which is reciprocally vertically elevatable and reciprocally horizontally extensible for loading the articles into the reactor furnace and subsequent unloading thereof with minimal disturbing of the reactor process residue which is inherently deposited in the interior of the reactor furnace.
申请公布号 JPS6095920(A) 申请公布日期 1985.05.29
申请号 JP19840209021 申请日期 1984.10.04
申请人 ADOBANSUTO SEMIKONDAKUTAA MATEIRIARUZU AMERIKA INC 发明人 DONARUDO MONROO OORUSON;NOOMAN REONAADO JIYAKUSON;JIERII AANESUTO TON
分类号 B25J9/00;B25J17/02;B65G47/90;H01L21/22;H01L21/31;H01L21/67;H01L21/677 主分类号 B25J9/00
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