发明名称 APPARATO PER L'ACCRESCIMENTO DI UN FOGLIO DI SILICIO MONOCRISTALLINO
摘要 Mechanical components, e.g. die and/or crucible or the like structures with which single silicon crystals are grown from the melt as shaped articles in thin sheet or ribbon geometry, are advantageously comprised, for their material of construction, of a suitable thermally stable and inert foundation substrate coated or provided on at least the silicon-contacting surface(s) thereof with a thin, uniform, integral surface layer deposit of pyrolitic silicon nitride (Si3N4) obtained by the chemical vapor deposition (i.e., "CVD") technique.
申请公布号 IT1084797(B) 申请公布日期 1985.05.28
申请号 IT19770028185 申请日期 1977.09.30
申请人 RCA CORP 发明人
分类号 C30B15/10;B32B18/00;C30B15/08;C30B15/24;C30B15/34;C30B29/06;H01L21/208;(IPC1-7):H01B/ 主分类号 C30B15/10
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