| 摘要 |
PURPOSE:To detect a position at a high speed and also with a good S/N by forming linear images being at right angles to each other by using a half mirror and the first and the second lenses, and detecting an operating each image by the first and the second one-dimensional position detecting elements. CONSTITUTION:Light from an object to be detected 2 is made to pass through a half mirror in a beam splitter 1, and made to form an image 4 extending to a Y1 direction crossing the first one-dimensional position detecting element 5 having a detecting surface extended in an X2 direction by the first lens 3. Also, a light reflected by the half mirror is made to form an image 9 extending to an X1 direction crossing the second one-dimensional position detecting element 10 having a detecting surface extended to a Y2 direction by the second lens 8. Moreover, the image 4 is processed by a position operation processing circuit 6 and a correcting circuit 7, and outputted as a position signal X. Subsequently, the image 9 is processed by a position operation processing circuit 11 and a correcting circuit 12, and outputted as a position signal Y. |
