| 摘要 |
A fluid jet ejector, such as is used in an inkjet printer head, is provided by a pair of spaced capacitor plates, one of which is a thin diaphragm, preferably of semiconductor material, such as silicon. The capacitor plates may be photolithographically developed. Impressing a time varying voltage on the capacitor causes the diaphragm to be set into mechanical motion. A reservoir containing fluid, such as ink, is contiguous the diaphragm and has a nozzle through which fluid exits responsive to diaphragm motion.
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