| 摘要 |
PURPOSE:To make a photoconductive member weatherproof and to provide high durability by laminating the 1st photoconductive layer of a-SiGe and the 2nd layer of a-SiC and by forming a layered region contg. O ununiformly in the thickness direction in the 1st layer so that the concn. curve in the thickness direction is made gentle and the maximum concn. is in the 1st layer. CONSTITUTION:The 1st layer 102 of a-SiGe and the 2nd layer 103 of a-SiC are laminated on a support 101. The layer 102 has a layered region O contg. oxygen atoms ununiformly in the thickness direction. The concn. curve of O in the region O in the thickness direction is gentle and the maximum concn. is in the layer 102. The layer 101 contains H and halogen atoms. Ge in the layer 102 is distributed ununiformly or uniformly. The layer 102 further contains a conductivity controlling substance. The resulting photoreceptive layer is tough and hard, has high adhesive strength to the support and withstands continuous repeated use at high speed. It has high photosensitivity and a high optical response speed, is well matched with semiconductor laser, and is used as an element for an electrophotographic device, a solid-state image pickup device, a reading devide or the like. |
