| 发明名称 |
PHOTORESIST COMPOSITION AND USE THEREOF |
| 摘要 |
Water soluble blends are provided of alkanolacrylamide, water soluble hydroxyl containing film forming organic oligomer and an effective amount of an onium salt photoinitiator. These photocurable compositions can be used as photoresists. |
| 申请公布号 |
JPS6095535(A) |
申请公布日期 |
1985.05.28 |
| 申请号 |
JP19840189845 |
申请日期 |
1984.09.12 |
| 申请人 |
GENERAL ELECTRIC CO |
发明人 |
JIEEMUSU BINSENTO KURIBERO |
| 分类号 |
G03F7/004;C08F2/48;G03F7/027;G03F7/029;G03F7/038;H01L21/027 |
主分类号 |
G03F7/004 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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