| 摘要 |
PURPOSE:To enable photographing and image observation to be optimumly performed by independently setting a scanning speed for the display of each image in a scanning electron microscope or similar device which has the split screen type function of simultaneously displaying different images. CONSTITUTION:The electron beam 2 of an electron gun 1 is irradiated upon a sample 5 through a diverging lens 3 and an objective 4. An X sweep wave is set by an X sweep setting device and produced by an X sweep wave generator 7. An X trigger pulse generator 9 produces a pulse signal for every frequency of the X sweep wave and a sweep wave generator 10 is controlled by means of a Y sweep number setting device 8 and a generator 9. The sweep waves of the generators 7 and 10 are supplied to a deflecting coil 14. A Y trigger pulse generator 15 produces a pulse signal for every frequency of a Y sweep wave. Predetermined two values one of which is arbitrarily selected by the operator are alternately used as the constant of the setting device 6. It is possible to optimumly display the results obtained by signal detectors 21 and 23 as different image in the upper and the lower valves of a CRT16 through a change-over circuit 25. |
