| 摘要 |
PURPOSE:To produce a highly precise kinetic force converter easily by a method wherein a distorted body is located in the linear direction i.e. only in the free boundray direction of the distorted body in terms of a kinetic force transmitter, a distorting body and the locational relation between the distorting body and gauge resistors. CONSTITUTION:Gauge resistors 1 are buried in the main surface of a rectangular distorting body 30 comprising a semiconductor substrate by impurity diffusing process. Multiple gauge resistors 1 are arranged in parallel with and perpendicular to the short side ends 40 of the rectangular distorted body 30 to be connected to leads 12 by small metallic wires 11. The multiple gauge resistors 1 are provided with the means to constitute the Wheastone bridge circuit. The four sides of the distorting body 1 comprise a pair of long side ends with free boundary and a pair of short side ends 40 rigidly adhering to a square-shaped supporting base 31 making the distorted body 30 vertically flexible. A kinetic force transmitter 7 is provided with a knife-shaped blade at the end while its edge 32 in the direction perpendicular to the free boundary side of the distorting body 30 i.e. in parallel with the short side direction comes into contact with the distorted body 30 at the central line of the free boundary side of said distorted body 30. |
