| 摘要 |
PURPOSE:To provide a titled target electrode which can operate stably for a long time even in a high sputtering region by inserting an insulating body for preventing generation of electric discharge in the space between the outside circumferential part of a cathode body and an earth shielding member and further providing an insulating cover for preventing sticking of the target material to the top end of said member. CONSTITUTION:An insulating body 8 consisting of SiO2, etc. is embedded in the shielding space between a cathode body 1 and a ring 2 constituting an earth shielding member to prevent generation of electric discharge in the space 6. An insulating cover 9 provided so as to cover the top end of the ring 2 is disposed to prevent sticking of a target material to the top end of the ring 2 and therefore the generation of short circuiting and abnormal insulation of the cathode is prevented. An insulating support member 10 which fixes the body 8 and the cover 9 is detained and fixed by means of a screw 11 consisting of an insulating member so as not to receive restriction in attaching the cathode. Generation of the electric discharge in the space 6 is obviated even in the high sputtering pressure region of about 5X10<-3>-1Torr, by which the electrode is operated stably for a long period of time. |
