| 摘要 |
PURPOSE:To attain to rapid exposure with excellent precision by a method wherein an exposed mask and a mask holder arranged not to abut against with each other in the horizontal direction. CONSTITUTION:A mask 1 is contained in a mask containing wall 3 provided on a mask holder 2 to be carried to specified position on a shifting rack 4 by a mask holder carrying mechanism. This holder 2 is abutted against a mask holder locating reference member 6 through the intermediary of a spring 5 restricting the vertical movement of the holder 2 by another spring 7. The mask 1 is abutted against a verticall locating reference member 10 of the mask 1 through the intermediary of the other spring 9. When the containing wall 3 is obliquie, the mask 1 and the containing wall 3 may be arranged not to abut against with each other in the horizontal direction in case the mask 1 is lifted up. |
