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发明名称
摘要
申请公布号	DE2516103(C2)	申请公布日期	1985.05.23
申请号	DE19752516103	申请日期	1975.04.12
申请人	VARIAN ASSOCIATES, INC., PALO ALTO, CALIF., US	发明人	ALLEN, WILLIAM, ANDOVER, MASS., US
分类号	H01J23/20;H01J23/207;H01J25/50;(IPC1-7):H01J23/213	主分类号	H01J23/20
代理机构		代理人
主权项
地址

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