发明名称 Test system for integrated circuit and method of testing.
摘要 <p>The conductive state of a transistor in a semiconductor integrated circuit (10) is determined by irradiating the transistor with a radiation beam and measuring changes in load current, thereby indicating whether the transistor was conducting or non-conducting prior to irradiation. A correlated double sampling method is employed in measuring changes in load current. A load resistor (42) in series with the device under test is capacitively coupled to differential amplification means (46) including a plurality of differential amplifiers with buffers connected between successive amplifiers. A system clock (44) is stopped at a predetermined time period prior to irradiating the transistor. A bypass switch (43) shunts the load resistor (42) until the clock (44) is stopped.</p>
申请公布号 EP0142366(A1) 申请公布日期 1985.05.22
申请号 EP19840307853 申请日期 1984.11.13
申请人 DATAPROBE CORPORATION 发明人 HENLEY, FRANCOIS J.
分类号 G01R31/26;G01R31/308;H01L21/66;(IPC1-7):G01R31/28 主分类号 G01R31/26
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