| 摘要 |
PURPOSE:To realize a magnetic control table, by installing magnetic material poles on the peripheral edges of a table in a manner that their axial directions coinside with X, Y, and Z axes respectively and arranging a permanent magnet facing to each axial end of the magnetic material poles and also providing table position sensors. CONSTITUTION:At the centers of opposite edges of a table 11 magnetic material poles 12-1 to 12-4, 13-1 to 13-4, and 14-1 to 14-4 which control the table 11 to X, Y, and Z directions are provided so as to make a pair each other, and position sensors 31-1 to 31-4, 32-2, 32-3, 33-1 to 33-4 are used for detection of the controlled position of the table 11. Further, No.1 and No.2 permanent magnets 21, 22 are disposed so that their S poles and N poles face to the axial ends of the magnetic material poles 12, 13. |
