发明名称 MULTISPINDLE MEASURING INSTRUMENT
摘要 The invention contemplates a multi-coordinate measuring machine with interferometric detection of the path of displacement in each of the measurement axes. Each measurement axis is provided with at least one interferometer head which consists of a beam splitter, reference mirror and photoelectric detector. The interferometer heads are supplied by a monomode fiber from a single stationary laser generator.
申请公布号 JPS6091203(A) 申请公布日期 1985.05.22
申请号 JP19840195892 申请日期 1984.09.20
申请人 CARL ZEISS STIFTUNG 发明人 HORUSUTO KUNTSUMAN;KAARU SHIETSUPERURE;GERUHARUTO TORIIPU
分类号 G01B9/02;G01B11/00 主分类号 G01B9/02
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