| 摘要 |
PURPOSE:To eliminate the need to alter an electrode system, potential distribution, etc., greatly according to whether the charge of an ion is positive or negative by causing the ion to strike a metallic plate temporarily and generating an electrically neutral atom, and guiding this to a secondary electron multiplier tube and converting it into a voltage signal. CONSTITUTION:A low-energy ion 6 of positive charge made incident to a slit 10 is accelerated by a power source 9 for acceleration to sufficient energy and then made incident to the metallic plate 5 slantingly. Almost all of ions strike atoms of the metallic plate elastically to lose the charge and become electrically neutral atoms, but have large kinetic energy. Eventually, the ion is converted into the atom by the metallic plate, and the atom is reflected to be made incident to the secondary electron multiplier tube 1. A secondary electron is generated there and multiplied to appear across a load resistance 3 as a voltage signal, so this signal is amplified by an amplifier 4 to detect the ion. |
