| 摘要 |
PURPOSE:To obtain a highly occurate, easy to handle and economical temperature sensor, by forming a bridge circuit with the specified resistance with a temperature measuring resistor of the specified material adjusted to the specified values of resistance and temperature coefficient and a resistance value. CONSTITUTION:A thin film temperature measuring resistor of the constant resistance value and of a temperature coefficient of 0-1,000 deg.C of 3,916 or 3,850ppm is formed by electroless plating, sputtering, etc. and trimming of metal containing a trace of Ni, W, Pd, etc. When a bridge circuit is formed by this resistor and a resistor of the resistance value as high as 1.5 times of the resistance at 0 deg.C, a temperature sensor of high-linearity, high-occuracy and high-economy can be obtained. |
