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发明名称
PLASMA-GESTIMULEERDE CHEMISCHE OPDAMPINRICHTING EN IN HET BIJZONDER EEN SUBSTRATENONDERSTEUNINGS- EN ELEKTRODEOPSTELLING DAARVOOR EN DE BETREFFENDE ONDERDELEN.
摘要
申请公布号
NL8303602(A)
申请公布日期
1985.05.17
申请号
NL19830003602
申请日期
1983.10.19
申请人
发明人
分类号
C23C16/509;H01J37/32;H01L21/673;H01L21/687;(IPC1-7):C23C16/50;H01L21/203
主分类号
C23C16/509
代理机构
代理人
主权项
地址
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