| 摘要 |
PURPOSE:To execute the adjustment of an optical axis and the correction of polarized light on measurement easily with high accuracy by forming an optical path through which beams from a polarized light source penetrate in a space, in which a work must be held, on surface treating processing. CONSTITUTION:A water holder 33 is fitted into a reaction chamber 31, and a port 35 for projecting polarized beams and a port 35' for emitting them are formed while using the center of a wafer 34 held to the holder 33 as the starting point. A drilled section 39, through which polarized beams can penetrate, is formed to the holder 33. A rectilinear propagation emitting port 35'' is shaped where opposite to the projecting port 35. Polarized beams are projected through the port 35 for projection from a polarized light source 36. An optical detecting section 38 is fitted to the rectilinear forwarding emitting port 35'', and an angle of incidence is adjusted and a polarizing prism for the polarized light source 36, a compensator, etc. are adjusted. Accordingly, adjustment is measurement using polarized light can be executed directly with high accuracy. |
