| 摘要 |
PURPOSE:To enable to perform the electrostatic junction of a member and an electrode member without hindrance by a method wherein the electrode member is installed on a position, where was avoided from each junction face on the periphery of the member, and desired junction voltage is impressed on the member through the electrode member. CONSTITUTION:Avoiding a cathode electrode plate 16 from butting on a junction face 10b, an electrode member 24 consisting of a winding-shaped conductor is winding-installed on the periphery of a pressure sensor pedestal 10 and the electrostatic junction of the pressure sensor pedestal 10 and an Si pressure sensitive element 12 is performed. As the member 24 is installed on such the position, there is no possibility that any recess or protrusion is interspersion-formed on the junction face 10b of the pedestal 10 and the mounting pedestal, even after the pedestal 10 and the element 12 were jointed mutually. Accordingly, in the following process, the junction of the pedestal 10 and the mounting pedestal can be performed without hindrance even in case the mounting pedestal is made an electrostatic junction on the junction face 10b of the pedestal 10. |
