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发明名称
ps Electron-beam scanning unit
摘要
Published without abstract.
申请公布号
DE3339811(A1)
申请公布日期
1985.05.15
申请号
DE19833339811
申请日期
1983.11.03
申请人
UNIVERSITAET KARLSRUHE INSTITUT FUER ELEKTROTECHNISCHE GRUNDLAGEN DER INFORMATIK
发明人
KRATZ,HARALD,DIPL.-ING.;SADORF,HELMUT,DIPL.-ING.
分类号
H01J37/04;(IPC1-7):H01J37/28;G01R31/26
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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