发明名称 |
Cantilever paddle for use with wafer boats |
摘要 |
A cantilever wafer paddle system for use in the manufacture of semiconductor devices so the system having two support members positioned above and attached to a suspension member such that the suspension member is capable of supporting and suspending a series of wafer boats within a diffusion tube without allowing any portion of the paddle, boats or wafers contained within the boats to contact the internal walls of the diffusion tube.
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申请公布号 |
US4516897(A) |
申请公布日期 |
1985.05.14 |
申请号 |
US19830496835 |
申请日期 |
1983.05.23 |
申请人 |
BERKELEY GLASSLAB |
发明人 |
SNIDER, WENDALL L.;WAGNER, EDWARD A. |
分类号 |
F27B9/24;(IPC1-7):F27D5/00 |
主分类号 |
F27B9/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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