| 摘要 |
PURPOSE:To obtain the titled element of high reliability excellent in the characteristics of moisture resistance and temperature resistance by using the first epoxy resin layer-polyimide resin layer-second epoxy resin layer as a protection layer. CONSTITUTION:A magnetic thin film of Fe, Ni, Co, alloy thereof or the like is formed on a substrate 21 made of glass, ceramic, ferrite, etc., and a magnetic thin film 2 of a required pattern is formed thereto. The entire surface is coated with the first epoxy layer by excluding parts a-n of electric conduction, and then coated with the polyimide resin layer after the semi-hardening of that layer. These epoxy adhesion layer and polyimide resin layer are completely hardened and thereafter coated with the second epoxy resin layer, which is then semi-hardened, resulting in the formation of a conductive layer over the entire surface of the first protection layer 24 consisting of the first epoxy resin layer-polyimide resin layer-second epoxy resin layer. After it is completely hardened, a required pattern, i.e., a biasing coil pattern 25, connection patterns 26 and 27, and conduction parts h-n are formed in the conductive layer. |
