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发明名称
ETCHING OF SILICON DIOXIDE BY PHOTOSENSITIVE SOLUTIONS
摘要
申请公布号
US3520687(A)
申请公布日期
1970.07.14
申请号
USD3520687
申请日期
1967.05.29
申请人
GENERAL ELECTRIC CO.
发明人
DONALD L. SCHAEFER
分类号
C03C23/00;G03F7/004;(IPC1-7):G03C5/00
主分类号
C03C23/00
代理机构
代理人
主权项
地址
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