MANUFACTURE OF SOLID LUBRICATING FILM

摘要

PURPOSE:To improve the adhesive strength of a solid lubricant such as WS2 or MoS2 to the sliding surface of a sliding member by forming a thin film of the solid lubricant on the sliding surface and implanting ions into the film. CONSTITUTION:A thin film 2 of a solid lubricant such as WS2 or MoS2 is formed by sputtering on the surface of the base 1 of a sliding member made of SUS440C stainless steel or the like. Ar ions 3 are then implanted into the film 2 under high energy to improve the adhesive strength of the film 2 to the base 1. A sliding member preventing the stripping of the lubricant film 2 even after repeated sliding is obtd.