发明名称 ARTICLE CONVEYING DEVICE
摘要 PURPOSE:To eliminate the needs of piping and wirings, etc., and thereby simplify a mechanism and operation of the captioned device by directly supplying a fluid or electric power conveyed in/out from each moving table for conveying in/out any article to a housing table upon conveying in/out an article by making use of said moving table between the housing table having plural stages stacked and said each moving table. CONSTITUTION:In an article conveying device comprising a conveying-in moving table 1 vertically movable including a U character-shaped fluid passage 2 having plural nozzles 3 provided on said table, a plural-stage housing table 5 including U character-shaped fluid passages 61, 71 having likewise plural nozzles 81, 91 perpendicularly to each other on the upper and lower parts of said housing table, and a conveying-out moving table 12 having substantially the same structure as said moving table 1, cylinders 28, 34 going forward/backward in the direction of the housing table 5 are provided on the respective moving tables 1, 12. Joints 29, 35 each having fluid supply holes are provided on the tips of piston rods of the respective cylinders 28, 34, and thereby said fluid supply holes can be adapted to be connected with said conveying-in/out fluid passages 61, 71 of the housing table 5 at elongation of the cylinders 28, 34.
申请公布号 JPS6082506(A) 申请公布日期 1985.05.10
申请号 JP19830188251 申请日期 1983.10.07
申请人 FUJITSU KK 发明人 WATANABE YOSHIO;ONO YOSHINOBU
分类号 B65G1/07;B65G1/00;B65G1/04;B65G1/06;B65G49/07;B65G51/02;B65G51/03;H01L21/67;H01L21/677 主分类号 B65G1/07
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