| 摘要 |
PURPOSE:To provide a titled controller capable of controlling correctly the flow rate and preventing the corrosion of an O ring, etc. by providing a heating means at a position on the secondary side of an orifice controlling the gas flow rate so as to prevent the liquefaction of a circulating gas on the secondary side. CONSTITUTION:In a flow rate controller which controls the gas flow rate by operating a thermal valve 56 equipped to a main passage 53, said thermal valve 56 is constituted of an inner cylinder 61, an outer cylinder 62, an actuator 69 with a ball 70 fixed at the leading end and contg. a heater 71, a seating part 63, etc. The flow rate passing through an orifice which is formed by the ball 70 and the seating part 63 is controlled by controlling the temp. of the actuator 69 on the basis of the sensor signal from the flow rate controller through said heater 71. The heat energy is supplied to the gas on the secondary side by a heater 72, etc. embedded in the main body of the controller on the downstream side to prevent the liquefaction of the gas. |
