| 摘要 |
PURPOSE:To make laser working safe by providing an electrolyzing device for an aq. soln. consisting of metal chloride and a pipeline for introducing the generated gaseous chlorine into a working chamber thereby generating a required amt. of the chlorine gas at every working and supplying said gas to the working part. CONSTITUTION:The inside of an evacuating chamber 1 is evacuated to 1- 10Torr or below by a mechanical booster 16, a rotary vacuum pump 19, etc. and gaseous chlorine is supplied from a nozzle 28 to the working part of a work 34. The laser light from a laser oscillator 6 is focused and irradiated to the working part of the work 34 by a focusing lens 7 by which the working part is worked. The gaseous chlorine to be supplied in this stage is generated only in the required amt. by electrolyzing the salt water in a salt water electrolyzing tank 21 and therefore danger is less. The supplied gaseous chlorine is conducted into a tank 17 contg. adsorptive water by the effect of the pump 19 and is adsorbed to water 18 and the therefore said gas is reutilizable by decomposing the water. |
