| 摘要 |
PURPOSE:To perform exchange of raw material gas sharply and quickly by driving out the raw material gas remaining in a pipe in the stage of exchanging the raw material gas with introduced hydrogen. CONSTITUTION:2n pairs of inlet and outlet of gas are arranged in a manner that the gas introduced from the (2n-1)th (n is an integer >=1) inlet exits the (2n-1) outlet, and the gas introduced from the 2n-th inlet exits the 2n-th outlet, and the (2n-1)th outlet 61 is commonly opened for all inlets 51, 53, 55 connected with said outlet. Three gas introducing pipes i.e. the An-th, the Bn-th, and the Cn-th pipes 42, 48, 45 are arranged to the (2n-1)th inlet and the 2n-th inlet. There are two states, the first state wherein an introducing pipe 42 is connected with the inlet 51 of the (2n-1)th pipe, and an introducing pipe 48 is connected with the 2n-th inlet 55, and the second state wherein an introducing pipe 48 is connected with the (2n-1)th inlet and an introducing pipe 45 is connected with the 2n-th inlet 53, and both states are exchanged with each other. By this method, the exchange of raw material gas is performed quickly and sharply. |
