发明名称 ELECTROSTATIC DEFLECTION CIRCUIT FOR ION BEAM
摘要 PURPOSE:To obtain the electrostatic deflection circuit capable of the high- velocity and wide-amplitude operation by forming an inverted signal of each deflection signal when accepting a horizontal deflection signal and a vertical deflection signal and transmitting said inverted signals through two signal insulation transmission circuits respectively to obtain the output from a complementary circuit. CONSTITUTION:Deflection signals X, -X, Y, and -Y are inputted into principal amplifiers 30-60 and the deflection signal X accepted by an amplifier U, for example, is converted into the input current of photocouplers D1 and D2 through transmission circuits 31 and 32. The signal which has been transmitted to the high-voltage side by the photocoupler D1 and D2 is transmitted after it is converted into the voltage variation between the gate and the source of a FET by signal acceptance circuits 33 and 34. A positive polar signal and a negative polar signal are alloted to the circuit composed of FETs Q1 and Q2 and the circuit composed of Q3 and Q4 respectively. As a result, the output terminal OUT effects the wide-amplitude operation of amplitude 800V in the -400V to +400V range at high velocity.
申请公布号 JPS61228624(A) 申请公布日期 1986.10.11
申请号 JP19850070464 申请日期 1985.04.02
申请人 JEOL LTD 发明人 OSAKI MITSUAKI
分类号 H01J37/147;H01J37/317;H01L21/027;H01L21/30 主分类号 H01J37/147
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